On Modification of Mismatch-Induced Stresses during Microwave Annealing of Radiation Defects Generated during the Radiation Processing of a Heterostructure
In this paper we formulate recommendations to decrease mismatch-induced stress in a heterostructure during microwave annealing of radiation defects, which were generated during radiation processing. Also we considered an analytical approach to analyze mass and heat transfer during the considered process. The approach gives a possibility to take into account changes in the parameters of processes in space and time, as well as the nonlinearity of the considered processes.
