Pulsed laser deposition is one of the most promising modern approaches for producing epitaxial layers. The approach gives a possibility to apply materials with special properties (metals, carbides, etc.) to the surface of parts, which allows restoring geometry, increasing surface strength and corrosion resistance, etc. This paper considers an analytical approach for solution of partial differential equations. This approach has been used for analysis of mass and heat transfer in reaction chamber during growth of the epitaxial layers by using pulse laser deposition. Changing of mass and heat transfer is investigated depending on a number of parameters. We consider an analytical approach for analysis of mass and heat transfer. The approach gives a possibility to take into account changing of parameters of processes both in space and time, as well as the nonlinearity of the processes. The approach was used for the analysis of mass and heat transfer in the reaction chamber during growth of epitaxial layer by using pulsed laser deposition. Changing of mass and heat transfer was investigated depending on series of parameters. The approach for analysis mass and heat transfer, which were considered in this work, makes it possible to carry out a more adequate prognosis of growth of an epitaxial layer by using pulsed laser deposition in comparison with similar approaches.
